Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage

Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra. Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage. In American Control Conference, ACC 2010, Baltimore, Maryland, USA, June 30 - July 2, 2010. pages 3493-3499, IEEE, 2010. [doi]

@inproceedings{HerpenOWB10,
  title = {Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage},
  author = {Robbert van Herpen and Tom Oomen and Marc M. J. van de Wal and Okko H. Bosgra},
  year = {2010},
  doi = {10.1109/ACC.2010.5530866},
  url = {https://doi.org/10.1109/ACC.2010.5530866},
  researchr = {https://researchr.org/publication/HerpenOWB10},
  cites = {0},
  citedby = {0},
  pages = {3493-3499},
  booktitle = {American Control Conference, ACC 2010, Baltimore, Maryland, USA, June 30 - July 2, 2010},
  publisher = {IEEE},
  isbn = {978-1-4244-7427-1},
}