Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra. Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage. In American Control Conference, ACC 2010, Baltimore, Maryland, USA, June 30 - July 2, 2010. pages 3493-3499, IEEE, 2010. [doi]
Abstract is missing.