Marc M. J. van de Wal - researchr alias

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Viewing Publication 1 - 10 from 10

2025

Optimal Co-Design of Sensor Placement and State Observer for Lithography ApplicationsR. P. P. F. Goetz, Nathan van de Wouw, Tom Oomen, Marc M. J. van de Wal, Bardia Sharif, Hans J. Zwart. ccta 2025: 321-326 [doi]

2021

Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer DeformationDaniel W. M. Veldman, Rob H. B. Fey, Hans Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer. tcst, 29(2):514-529, 2021. [doi]

2020

Sensor and Actuator Placement for Proportional Feedback Control in Advection-Diffusion EquationsDaniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, J. D. B. J. van den Boom, Hendrik Nijmeijer. csysl, 4(1):193-198, 2020. [doi]

2019

Optimal actuator shape design with input and state constraints for a wafer heating applicationDaniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, J. D. B. J. van den Boom, Henk Nijmeijer. amcc 2019: 3789-3794 [doi]

2010

Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stageRobbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra. amcc 2010: 3493-3499 [doi]

2007

Aliasing of Resonance Phenomena in Sampled-Data Feedback Control Design: Hazards, Modeling, and a SolutionTom Oomen, Marc M. J. van de Wal, Okko H. Bosgra. amcc 2007: 2881-2886 [doi]

2006

Exploiting H∞ Sampled-Data Control Theory for High-Precision Electromechanical Servo Control DesignTom Oomen, Marc M. J. van de Wal, Okko H. Bosgra. amcc 2006: 1086-1091 [doi]

2004

∞ control applied to a wafer stage modelM. J. Zandvliet, Carsten W. Scherer, Camile W. J. Hol, Marc M. J. van de Wal. cdc 2006: 796-802 [doi]

2003

Model-based feedforward for motion systemsMatthijs Boerlage, Maarten Steinbuch, Paul F. Lambrechts, Marc M. J. van de Wal. IEEEcca 2003: 1158-1163 [doi]

2001

Experimentally validated multivariable μ feedback controller design for a high-precision wafer stageMarc M. J. van de Wal, Gregor van Baars, Frank Sperling, Okko H. Bosgra. cdc 2001: 1583-1588 [doi]

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