Marc M. J. van de Wal - researchr alias

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Viewing Publication 1 - 8 from 8

2021

Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer DeformationDaniel W. M. Veldman, Rob H. B. Fey, Hans Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer. tcst, 29(2):514-529, 2021. [doi]

2020

Sensor and Actuator Placement for Proportional Feedback Control in Advection-Diffusion EquationsDaniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, J. D. B. J. van den Boom, Hendrik Nijmeijer. csysl, 4(1):193-198, 2020. [doi]

2019

Optimal actuator shape design with input and state constraints for a wafer heating applicationDaniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, J. D. B. J. van den Boom, Henk Nijmeijer. amcc 2019: 3789-3794 [doi]

2010

Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stageRobbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra. amcc 2010: 3493-3499 [doi]

2007

Aliasing of Resonance Phenomena in Sampled-Data Feedback Control Design: Hazards, Modeling, and a SolutionTom Oomen, Marc M. J. van de Wal, Okko H. Bosgra. amcc 2007: 2881-2886 [doi]

2006

Exploiting H∞ Sampled-Data Control Theory for High-Precision Electromechanical Servo Control DesignTom Oomen, Marc M. J. van de Wal, Okko H. Bosgra. amcc 2006: 1086-1091 [doi]

2004

∞ control applied to a wafer stage modelM. J. Zandvliet, Carsten W. Scherer, Camile W. J. Hol, Marc M. J. van de Wal. cdc 2006: 796-802 [doi]

2001

Experimentally validated multivariable μ feedback controller design for a high-precision wafer stageMarc M. J. van de Wal, Gregor van Baars, Frank Sperling, Okko H. Bosgra. cdc 2001: 1583-1588 [doi]

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