M. J. Zandvliet, Carsten W. Scherer, Camile W. J. Hol, Marc M. J. van de Wal. ∞ control applied to a wafer stage model. In 45th IEEE Conference on Decision and Control, CDC 2006, San Diego, CA, USA, 13-15 December, 2006. pages 796-802, IEEE, 2004. [doi]
Abstract is missing.