Marc M. J. van de Wal, Gregor van Baars, Frank Sperling, Okko H. Bosgra. Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage. In 40th IEEE Conference on Decision and Control, CDC 2001, Orlando, FL, USA, 4-7 Dec., 2001. pages 1583-1588, IEEE, 2001. [doi]
Abstract is missing.