Precise visual inspection for LSI wafer patterns using subpixel image alignment - researchr publication authors

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Takashi Hiroi, Shunji Maeda, Hitoshi Kubota, Kenji Watanabe, Yasuo Nakagawa. Precise visual inspection for LSI wafer patterns using subpixel image alignment. In Proceedings of Second IEEE Workshop on Applications of Computer Vision, WACV 1994, Sarasota, FL, USA, December 5-7, 1994. pages 26-34, IEEE, 1994. [doi]

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