Takashi Hiroi, Shunji Maeda, Hitoshi Kubota, Kenji Watanabe, Yasuo Nakagawa. Precise visual inspection for LSI wafer patterns using subpixel image alignment. In Proceedings of Second IEEE Workshop on Applications of Computer Vision, WACV 1994, Sarasota, FL, USA, December 5-7, 1994. pages 26-34, IEEE, 1994. [doi]
@inproceedings{HiroiMKWN94,
title = {Precise visual inspection for LSI wafer patterns using subpixel image alignment},
author = {Takashi Hiroi and Shunji Maeda and Hitoshi Kubota and Kenji Watanabe and Yasuo Nakagawa},
year = {1994},
doi = {10.1109/ACV.1994.341284},
url = {http://dx.doi.org/10.1109/ACV.1994.341284},
researchr = {https://researchr.org/publication/HiroiMKWN94},
cites = {0},
citedby = {0},
pages = {26-34},
booktitle = {Proceedings of Second IEEE Workshop on Applications of Computer Vision, WACV 1994, Sarasota, FL, USA, December 5-7, 1994},
publisher = {IEEE},
isbn = {0-8186-6410-X},
}