Novel Gyrotron Beam Annealing Method for Mg-Implanted Bulk GaN

K. Hogan, S. Tozier, E. Rocco, I. Mahaboob, V. Meyers, B. McEwen, F. Shahedipour-Sandvik, R. Tompkins, M. Derenge, Kenneth Jones, M. Shevelev, V. Sklyar, A. Lang, J. Hart, M. Taheri, M. Reshchikov. Novel Gyrotron Beam Annealing Method for Mg-Implanted Bulk GaN. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-6, IEEE, 2019. [doi]

Abstract

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