The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach

M. M. Hoogesteger, H. Sadeghian, Henk Nijmeijer. The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2021, Delft, The Netherlands, July 12-16, 2021. pages 110-115, IEEE, 2021. [doi]

@inproceedings{HoogestegerSN21,
  title = {The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach},
  author = {M. M. Hoogesteger and H. Sadeghian and Henk Nijmeijer},
  year = {2021},
  doi = {10.1109/AIM46487.2021.9517484},
  url = {https://doi.org/10.1109/AIM46487.2021.9517484},
  researchr = {https://researchr.org/publication/HoogestegerSN21},
  cites = {0},
  citedby = {0},
  pages = {110-115},
  booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2021, Delft, The Netherlands, July 12-16, 2021},
  publisher = {IEEE},
  isbn = {978-1-6654-4139-1},
}