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The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach

M. M. Hoogesteger, H. Sadeghian, Henk Nijmeijer. The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2021, Delft, The Netherlands, July 12-16, 2021. pages 110-115, IEEE, 2021. [doi]

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