Direct measurement of residual stress in integrated circuit interconnect features

A. B. Horsfall, J. M. M. dos Santos, S. M. Soare, N. G. Wright, A. G. O Neill, S. J. Bull, A. J. Walton, A. M. Gundlach, J. T. M. Stevenson. Direct measurement of residual stress in integrated circuit interconnect features. Microelectronics Reliability, 43(9-11):1797-1801, 2003. [doi]

Abstract

Abstract is missing.