DPPM Reduction Methods and New Defect Oriented Test Methods Applied to Advanced FinFET Technologies

W. Howell, Friedrich Hapke, E. Brazil, S. Venkataraman, R. Datta, Andreas Glowatz, Wilfried Redemund, J. Schmerberg, Anja Fast, Janusz Rajski. DPPM Reduction Methods and New Defect Oriented Test Methods Applied to Advanced FinFET Technologies. In IEEE International Test Conference, ITC 2018, Phoenix, AZ, USA, October 29 - Nov. 1, 2018. pages 1-10, IEEE, 2018. [doi]

Authors

W. Howell

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Friedrich Hapke

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E. Brazil

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S. Venkataraman

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R. Datta

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Andreas Glowatz

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Wilfried Redemund

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J. Schmerberg

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Anja Fast

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Janusz Rajski

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