Theoretical and experimental investigation on performance enhancement effect for a novel capacitive pressure sensor with double-cavity

Mengwen Hu, Pandi Chen, Xichun Qu, Mengke Li, Zhiyong Duan, Liuhong Ma. Theoretical and experimental investigation on performance enhancement effect for a novel capacitive pressure sensor with double-cavity. IEICE Electronic Express, 20(13):20230187, 2023. [doi]

Abstract

Abstract is missing.