Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer - researchr publication authors

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Qifang Hu, Chengchen Gao, Yilong Hao, Dacheng Zhang, Guizhen Yan, Yangxi Zhang. Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1036-1039, IEEE, 2010. [doi]

This author has not been identified. Look up 'Qifang Hu' in GoogleThis author has not been identified. Look up 'Chengchen Gao' in GoogleThis author has not been identified. Look up 'Yilong Hao' in GoogleThis author has not been identified. Look up 'Dacheng Zhang' in GoogleThis author has not been identified. Look up 'Guizhen Yan' in GoogleThis author has not been identified. Look up 'Yangxi Zhang' in Google

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