Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer

Qifang Hu, Chengchen Gao, Yilong Hao, Dacheng Zhang, Guizhen Yan, Yangxi Zhang. Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1036-1039, IEEE, 2010. [doi]

Abstract

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