Qifang Hu, Chengchen Gao, Yilong Hao, Dacheng Zhang, Guizhen Yan, Yangxi Zhang. Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1036-1039, IEEE, 2010. [doi]
@inproceedings{HuGHZYZ10,
title = {Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer},
author = {Qifang Hu and Chengchen Gao and Yilong Hao and Dacheng Zhang and Guizhen Yan and Yangxi Zhang},
year = {2010},
doi = {10.1109/NEMS.2010.5592578},
url = {http://dx.doi.org/10.1109/NEMS.2010.5592578},
researchr = {https://researchr.org/publication/HuGHZYZ10},
cites = {0},
citedby = {0},
pages = {1036-1039},
booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
publisher = {IEEE},
}