Investigation and optimization of electrical and thermal performance for 5-nm GAA vertically stacked nanowire FETs

Ning Huang, Weijing Liu, Qinghua Li, Wei Bai, Xiadong Tang, Ting Yang. Investigation and optimization of electrical and thermal performance for 5-nm GAA vertically stacked nanowire FETs. Microelectronics Journal, 95, 2020. [doi]

Authors

Ning Huang

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Weijing Liu

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Qinghua Li

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Wei Bai

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Xiadong Tang

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Ting Yang

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