Investigation and optimization of electrical and thermal performance for 5-nm GAA vertically stacked nanowire FETs

Ning Huang, Weijing Liu, Qinghua Li, Wei Bai, Xiadong Tang, Ting Yang. Investigation and optimization of electrical and thermal performance for 5-nm GAA vertically stacked nanowire FETs. Microelectronics Journal, 95, 2020. [doi]

Abstract

Abstract is missing.