Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics

Ying Huang, Xianshu Luo, Junfeng Song, Tsung-Yang Liow, Patrick Guo-Qiang Lo. Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics. In Optical Fiber Communications Conference and Exhibition, OFC 2014, San Francisco, CA, USA, March 9-13, 2014. pages 1-3, IEEE, 2014. [doi]

Abstract

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