F. Huang, B. Saini, L. Wan, H. Lu, X. He, S. Qin, W. Tsai, A. Gruverman, Andrew C. Meng, H.-S. Philip Wong, P. C. McIntyre, S. S. Wong. First Observation of Ultra-high Polarization (~ 108 μC/cm²) in Nanometer Scaled High Performance Ferroelectric HZO Capacitors with Mo Electrodes. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]
@inproceedings{HuangSWLHQTGMWM23,
title = {First Observation of Ultra-high Polarization (~ 108 μC/cm²) in Nanometer Scaled High Performance Ferroelectric HZO Capacitors with Mo Electrodes},
author = {F. Huang and B. Saini and L. Wan and H. Lu and X. He and S. Qin and W. Tsai and A. Gruverman and Andrew C. Meng and H.-S. Philip Wong and P. C. McIntyre and S. S. Wong},
year = {2023},
doi = {10.23919/VLSITechnologyandCir57934.2023.10185240},
url = {https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185240},
researchr = {https://researchr.org/publication/HuangSWLHQTGMWM23},
cites = {0},
citedby = {0},
pages = {1-2},
booktitle = {2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023},
publisher = {IEEE},
isbn = {978-4-86348-806-9},
}