F. Huang, B. Saini, L. Wan, H. Lu, X. He, S. Qin, W. Tsai, A. Gruverman, Andrew C. Meng, H.-S. Philip Wong, P. C. McIntyre, S. S. Wong. First Observation of Ultra-high Polarization (~ 108 μC/cm²) in Nanometer Scaled High Performance Ferroelectric HZO Capacitors with Mo Electrodes. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]
Abstract is missing.