Modeling and Performance Evaluation for Automated Material Handling Systems in a 300mm Foundry Fab

Han-Pang Huang, Chun-Tsong Wang. Modeling and Performance Evaluation for Automated Material Handling Systems in a 300mm Foundry Fab. In Proceedings of the 2002 IEEE International Conference on Robotics and Automation, ICRA 2002, May 11-15, 2002, Washington, DC, USA. pages 3181-3186, IEEE, 2002.

Abstract

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