Development of a large scanning-range atomic force microscope with adaptive complementary sliding mode controller

Kuan-Chia Huang, Jim-Wei Wu, Jyun-Jhih Chen, Chih-Lieh Chen, Mei-Yung Chen, Li-Chen Fu. Development of a large scanning-range atomic force microscope with adaptive complementary sliding mode controller. In Proceedings of the 51th IEEE Conference on Decision and Control, CDC 2012, December 10-13, 2012, Maui, HI, USA. pages 1685-1690, IEEE, 2012. [doi]

Abstract

Abstract is missing.