MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage Using Rational Basis Functions - researchr publication authors

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Weicai Huang, Kaiming Yang, Yu Zhu 0001. MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage Using Rational Basis Functions. In Xin-Jun Liu, Zhenguo Nie, Jingjun Yu, Fugui Xie, Rui Song, editors, Intelligent Robotics and Applications - 14th International Conference, ICIRA 2021, Yantai, China, October 22-25, 2021, Proceedings, Part II. Volume 13014 of Lecture Notes in Computer Science, pages 353-363, Springer, 2021. [doi]

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