Weicai Huang, Kaiming Yang, Yu Zhu 0001. MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage Using Rational Basis Functions. In Xin-Jun Liu, Zhenguo Nie, Jingjun Yu, Fugui Xie, Rui Song, editors, Intelligent Robotics and Applications - 14th International Conference, ICIRA 2021, Yantai, China, October 22-25, 2021, Proceedings, Part II. Volume 13014 of Lecture Notes in Computer Science, pages 353-363, Springer, 2021. [doi]
@inproceedings{HuangYZ21-2,
title = {MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage Using Rational Basis Functions},
author = {Weicai Huang and Kaiming Yang and Yu Zhu 0001},
year = {2021},
doi = {10.1007/978-3-030-89098-8_34},
url = {https://doi.org/10.1007/978-3-030-89098-8_34},
researchr = {https://researchr.org/publication/HuangYZ21-2},
cites = {0},
citedby = {0},
pages = {353-363},
booktitle = {Intelligent Robotics and Applications - 14th International Conference, ICIRA 2021, Yantai, China, October 22-25, 2021, Proceedings, Part II},
editor = {Xin-Jun Liu and Zhenguo Nie and Jingjun Yu and Fugui Xie and Rui Song},
volume = {13014},
series = {Lecture Notes in Computer Science},
publisher = {Springer},
isbn = {978-3-030-89098-8},
}