Modeling and Analysis of Flexure-based Nano-Positioning Device Driven by Voice Coil Actuator

Xiaolu Huang, Bao Yang, Chi Zhang, Silu Cherr, Jinhua Chen, Youyong Liao. Modeling and Analysis of Flexure-based Nano-Positioning Device Driven by Voice Coil Actuator. In 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2018, Auckland, New Zealand, July 9-12, 2018. pages 563-568, IEEE, 2018. [doi]

Abstract

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