Hussein Hussein, Patrice Le Moal, Gilles Bourbon, Yassine Haddab, Philippe Lutz. Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2015, Busan, South Korea, July 7-11, 2015. pages 836-841, IEEE, 2015. [doi]
Abstract is missing.