Manuel Innocent, Piet Wambacq, Stéphane Donnay, Harrie A. C. Tilmans, Willy M. C. Sansen, Hugo De Man. An analytic Volterra-series-based model for a MEMS variable capacitor. IEEE Trans. on CAD of Integrated Circuits and Systems, 22(2):124-131, 2003. [doi]
Abstract is missing.