Self-assembly technique for MEMS vertical comb electrostatic actuator

K. Isamoto, T. Makino, A. Moroswa, C. Chong, Hamido Fujita, H. Toshiyoshi. Self-assembly technique for MEMS vertical comb electrostatic actuator. IEICE Electronic Express, 2(9):311-315, 2005. [doi]

Abstract

Abstract is missing.