Evaluating the benefits of relaxed BEOL pitch for deeply scaled ICs

Mehmet Meric Isgenc, Samuel Pagliarini, Renzhi Liu, Larry T. Pileggi. Evaluating the benefits of relaxed BEOL pitch for deeply scaled ICs. In 18th International Symposium on Quality Electronic Design, ISQED 2017, Santa Clara, CA, USA, March 14-15, 2017. pages 180-185, IEEE, 2017. [doi]

Abstract

Abstract is missing.