Tsutomu Ishida, Izumi Nitta, Daisuke Fukuda, Yuzi Kanazawa. Deep Learning-Based Wafer-Map Failure Pattern Recognition Framework. In 20th International Symposium on Quality Electronic Design, ISQED 2019, Santa Clara, CA, USA, March 6-7, 2019. pages 291-297, IEEE, 2019. [doi]
@inproceedings{IshidaNFK19,
title = {Deep Learning-Based Wafer-Map Failure Pattern Recognition Framework},
author = {Tsutomu Ishida and Izumi Nitta and Daisuke Fukuda and Yuzi Kanazawa},
year = {2019},
doi = {10.1109/ISQED.2019.8697407},
url = {https://doi.org/10.1109/ISQED.2019.8697407},
researchr = {https://researchr.org/publication/IshidaNFK19},
cites = {0},
citedby = {0},
pages = {291-297},
booktitle = {20th International Symposium on Quality Electronic Design, ISQED 2019, Santa Clara, CA, USA, March 6-7, 2019},
publisher = {IEEE},
isbn = {978-1-7281-0392-1},
}