Tsutomu Ishida, Izumi Nitta, Daisuke Fukuda, Yuzi Kanazawa. Deep Learning-Based Wafer-Map Failure Pattern Recognition Framework. In 20th International Symposium on Quality Electronic Design, ISQED 2019, Santa Clara, CA, USA, March 6-7, 2019. pages 291-297, IEEE, 2019. [doi]
Abstract is missing.