Autoencoder-Based Data Sampling for Machine Learning-Based Lithography Hotspot Detection

Mohamed Tarek Ismail, Hossam Sharara, Kareem Madkour, Karim Seddik. Autoencoder-Based Data Sampling for Machine Learning-Based Lithography Hotspot Detection. In MLCAD '22: 2022 ACM/IEEE Workshop on Machine Learning for CAD, Virtual Event China, September 12 - 13, 2022. pages 91-96, ACM, 2022. [doi]

Abstract

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