Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers - researchr publication authors

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Atsushi Isobe, Yudai Kamada, Takashi Oshima, Yuki Furubayashi, Noriyuki Sakuma, Chisaki Takubo, Yasushi Tainaka, Keiki Watanabe, Tomonori Sekiguchi. Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

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