Atsushi Isobe, Yudai Kamada, Takashi Oshima, Yuki Furubayashi, Noriyuki Sakuma, Chisaki Takubo, Yasushi Tainaka, Keiki Watanabe, Tomonori Sekiguchi. Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]
@inproceedings{IsobeKOFSTTWS18,
title = {Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers},
author = {Atsushi Isobe and Yudai Kamada and Takashi Oshima and Yuki Furubayashi and Noriyuki Sakuma and Chisaki Takubo and Yasushi Tainaka and Keiki Watanabe and Tomonori Sekiguchi},
year = {2018},
doi = {10.1109/ICSENS.2018.8589945},
url = {https://doi.org/10.1109/ICSENS.2018.8589945},
researchr = {https://researchr.org/publication/IsobeKOFSTTWS18},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018},
publisher = {IEEE},
isbn = {978-1-5386-4707-3},
}