On-chip fabrication and assembly of rotational microstructures

Masaki Ito, Masahiro Nakajima, Hisataka Maruyama, Toshio Fukuda. On-chip fabrication and assembly of rotational microstructures. In 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, October 11-15, 2009, St. Louis, MO, USA. pages 1849-1854, IEEE, 2009. [doi]

Authors

Masaki Ito

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Masahiro Nakajima

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Hisataka Maruyama

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Toshio Fukuda

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