On-chip fabrication and assembly of rotational microstructures

Masaki Ito, Masahiro Nakajima, Hisataka Maruyama, Toshio Fukuda. On-chip fabrication and assembly of rotational microstructures. In 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, October 11-15, 2009, St. Louis, MO, USA. pages 1849-1854, IEEE, 2009. [doi]

@inproceedings{ItoNMF09,
  title = {On-chip fabrication and assembly of rotational microstructures},
  author = {Masaki Ito and Masahiro Nakajima and Hisataka Maruyama and Toshio Fukuda},
  year = {2009},
  doi = {10.1109/IROS.2009.5354506},
  url = {http://dx.doi.org/10.1109/IROS.2009.5354506},
  researchr = {https://researchr.org/publication/ItoNMF09},
  cites = {0},
  citedby = {0},
  pages = {1849-1854},
  booktitle = {2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, October 11-15, 2009, St. Louis, MO, USA},
  publisher = {IEEE},
}