F. Ivaldi, Tomasz Bieniek, Pawel Janus, Jerzy Zajac, Piotr Grabiec, W. Majstrzyk, D. Kopiec, Teodor P. Gotszalk. New approach for a multi-cantilever arrays sensor system with advanced MOEMS readout. In 46th European Solid-State Device Research Conference, ESSDERC 2016, Lausanne, Switzerland, September 12-15, 2016. pages 444-447, IEEE, 2016. [doi]
Abstract is missing.