Stephen C. Jacobsen, R. H. Price, John E. Wood, T. H. Rytting, M. Rafaelof. The wobble motor: design, fabrication and testing of an eccentric-motion electrostatic microactuator. In Proceedings of the 1989 IEEE International Conference on Robotics and Automation, Scottsdale, Arizona, USA, May 14-19, 1989. pages 1536-1546, IEEE, 1989. [doi]
Abstract is missing.