A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts

Maryam Jalali, James J. Marti, Allison L. Kirchhoff, Frances Lawrenz, Stephen A. Campbell. A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts. IEEE Trans. Education, 55(4):517-524, 2012. [doi]

Abstract

Abstract is missing.