LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes

Dima El Jamal, Bouchra Ananou, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes. In European Control Conference, ECC 2022, London, United Kingdom, July 12-15, 2022. pages 491-496, IEEE, 2022. [doi]

Abstract

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