Jaehun Jeong, Sanghyeon Lee, Sada-Aki Masuoka, Shincheol Min, Sanghoon Lee, Seungkwon Kim, Taehun Myung, Byungha Choi, Chang-Woo Sohn, Sung Won Kim, Jeongmin Choi, Jungmin Park, Hyungjong Lee, Taeyoung Kim, Seokhoon Kim, Yuri Yasuda-Masuoka, Ja-Hum Ku, Gitae Jeong. World's First GAA 3nm Foundry platform Technology (SF3) with Novel Multi-Bridge-Channel-FET (MBCFET™) Process. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]
Abstract is missing.