Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Cuiping Jia, Wei Dong, Caixia Liu, Xindong Zhang, Jingran Zhou, Zhicheng Zhong, Hailin Xue, Huidong Zang, Baokun Xu, Weiyou Chen. Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon. Microelectronics Journal, 37(11):1297-1301, 2006. [doi]

This author has not been identified. Look up 'Cuiping Jia' in GoogleThis author has not been identified. Look up 'Wei Dong' in GoogleThis author has not been identified. Look up 'Caixia Liu' in GoogleThis author has not been identified. Look up 'Xindong Zhang' in GoogleThis author has not been identified. Look up 'Jingran Zhou' in GoogleThis author has not been identified. Look up 'Zhicheng Zhong' in GoogleThis author has not been identified. Look up 'Hailin Xue' in GoogleThis author has not been identified. Look up 'Huidong Zang' in GoogleThis author has not been identified. Look up 'Baokun Xu' in GoogleThis author has not been identified. Look up 'Weiyou Chen' in Google

runs on WebDSL