Multiple Patterning Layout Decomposition Considering Complex Coloring Rules and Density Balancing

Iris Hui-Ru Jiang, Hua-Yu Chang. Multiple Patterning Layout Decomposition Considering Complex Coloring Rules and Density Balancing. IEEE Trans. on CAD of Integrated Circuits and Systems, 36(12):2080-2092, 2017. [doi]

@article{JiangC17-1,
  title = {Multiple Patterning Layout Decomposition Considering Complex Coloring Rules and Density Balancing},
  author = {Iris Hui-Ru Jiang and Hua-Yu Chang},
  year = {2017},
  doi = {10.1109/TCAD.2017.2681068},
  url = {https://doi.org/10.1109/TCAD.2017.2681068},
  researchr = {https://researchr.org/publication/JiangC17-1},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume = {36},
  number = {12},
  pages = {2080-2092},
}