Multiple Patterning Layout Decomposition Considering Complex Coloring Rules and Density Balancing

Iris Hui-Ru Jiang, Hua-Yu Chang. Multiple Patterning Layout Decomposition Considering Complex Coloring Rules and Density Balancing. IEEE Trans. on CAD of Integrated Circuits and Systems, 36(12):2080-2092, 2017. [doi]

Abstract

Abstract is missing.