Silicon cavity resonator based on locally resonant phononic crystal

Wanli Jiang, Duan Feng, Dehui Xu, Bin Xiong, Yuelin Wang, Wanli Jiang, Duan Feng. Silicon cavity resonator based on locally resonant phononic crystal. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

Abstract

Abstract is missing.