Study on PBL and TCAD Tools in Microelectronics Process Education

DanDan Jiang, Wenying Ma, Jian Tao, Song Ye, Zhongyun Li. Study on PBL and TCAD Tools in Microelectronics Process Education. In 10th International Conference on Educational and Information Technology, ICEIT 2021, Chengdu, China, January 18-20, 2021. pages 88-91, IEEE, 2021. [doi]

Abstract

Abstract is missing.