Characterization of line edge roughness and line width roughness of nano-scale typical structures - researchr publication authors

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Zhuangde Jiang, Fengxia Zhao, Weixuan Jing, Philip D. Prewett, Kyle Jiang. Characterization of line edge roughness and line width roughness of nano-scale typical structures. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 299-303, IEEE, 2009. [doi]

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