Qian Jin, Yumeng Liu, Yuqi Jiang, Qi Sun 0002, Cheng Zhuo. Invited Paper: Unitho: A Unified Multi-Task Framework for Computational Lithography. In IEEE/ACM International Conference On Computer Aided Design, ICCAD 2025, Munich, Germany, October 26-30, 2025. pages 1-9, IEEE, 2025. [doi]
Abstract is missing.