Analysis and optimization of SRAM robustness for double patterning lithography

Vivek Joshi, Kanak Agarwal, David Blaauw, Dennis Sylvester. Analysis and optimization of SRAM robustness for double patterning lithography. In 2010 International Conference on Computer-Aided Design (ICCAD 10), November 7-11, 2010, San Jose, CA, USA. pages 25-31, IEEE, 2010. [doi]

Authors

Vivek Joshi

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Kanak Agarwal

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David Blaauw

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Dennis Sylvester

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